User's Guide to Vacuum Technology
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Type
Book
Authors
ISBN 10
0471812420
ISBN 13
9780471812425
Category
REFERENCE
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Publication Year
1989
Publisher
Pages
512
Description
An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. - from Amzon
Number of Copies
1
Library | Accession‎ No | Call No | Copy No | Edition | Location | Availability |
---|---|---|---|---|---|---|
Main | 10366 | TJ 940. O37 1989 | 1 | Yes |