Fundamentals of Microfabrication
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Type
Book
Authors
ISBN 10
0849394511
ISBN 13
9780849394515
Category
REFERENCE
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Publication Year
1998
Publisher
Pages
589
Tags
Description
Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format. - from Amzon
Number of Copies
1
Library | Accession No | Call No | Copy No | Edition | Location | Availability |
---|---|---|---|---|---|---|
Main | 23783 | TK 7836.M33 1997 | 1 | Yes |