Thin Film Processes

Type

Book

Authors

John L. Vossen

Werner Kern

ISBN 10

0127282505

ISBN 13

9780127282503

Tags

Circuits, Extraction & Processing, Materials Science, Technology, New, Used & Rental Textbooks

Description

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process. - from Amzon

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