An Introduction to Microelectromechanical Systems Engineering

Type

Book

Authors

Nadim Maluf

ISBN 13

9780890065815

Tags

Civil & Environmental, Microelectronics, Mechanical, Mechanical Engineering

Description

Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems. - from Amzon

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