Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)

Type

Book

Authors

Harry J. Levinson

ISBN 10

0819430528

ISBN 13

9780819430526

Tags

Semiconductors, Industrial, Manufacturing & Operational Systems, Optics, New, Used & Rental Textbooks

Description

Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.Contents - Preface - Introduction to the use of statistical process control in lithography - Sampling - Simple and complex processes - Linewidth control - Overlay - Yield - Process drift and automatic process control - Metrology - Control of operations - from Amzon

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