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Author: Harry J. Levinson [ All ]

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  Title Copies
Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28) 
Year: 1999 
ISBN: 0819430528 
ISBN 13: 9780819430526 
 1 
Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146) 
Edition: 2 
Year: 2005 
ISBN: 0819456608 
ISBN 13: 9780819456601 
 1